Enabling Technologies

Center research is also directed toward technologies needed to effectively employ the Micro/Nano Fabrication Processes in a nanomanufacturing system and by themselves can stand alone:

  • Microfluidics: the Center has developed expertise in fabricating very large scale integrated (VLSI) microfluidic arrays with individually addressable nozzles/cells with fluid flow control valving, pumps and embedded electrical and optical sensing with combinatorial chemistry mixing and screening applications.
  • Microfluidic Chem-Bio Sensors: high resolution micro-nanoscale surface patterning and structures technologies being developed in the Center provide high sensitivity sensing systems of extremely low concentrations in picco liter volumes.
  • Micro-Electrical-Mechanical Systems (MEMS) Positioning Stages: MEMS silicon-on-insulator (SOI) positioning stages to provide nanoscale precision, speed and control.
  • Advanced Control Systems: high performance control systems and schemes for rapid nanoscale positioning and registration