Micro/Nano Fabrication Processes

The following basic process technologies being developed in the Center provide the basis for our "toolbit" based nanomanufacturing concept to make manufacturing at the nanoscale routine.

  • Electrohydrodynamic Jet (E-Jet) Printing: an electrostatic based jet printing process capable "printing" submicron dots and lines with a wide range of functional "inks".
  • Superionic Solid State Stamping (S4): a dry electrochemical etch process capable of producing 3-D structures from thin metal films with line width resolutions approaching 20 nanometers
  • Metal Assisted Chemical Etching (MacEtch): a process that can produce arrays of nanowires, trenches and other 3D structures directly in silicon.
  • Meniscus-Controlled Deposition: an electrochemical process capable of producing out-of-plane wires and shapes from metal salts.
  • Cantilever Tip-base Processes: a series of nanoscale tools based on electrically controlled or heated atomic force microscopy tips for unique nanoscale fabrication processes and highly precise surface transformations.
  • Direct Ink Write: a rapid patterning process using pressure driven microfluidic deposition nozzle to make complex 2-D and 3-D filamentary lines and structures.
  • Micro-Transfer Printing - Flexible and Stretchable Electronics: an adhesiveless transfer printing process of micro/nanoscale wafer-produced devices (LEDs, sensors, TFTs, FETs, etc.), wires, single wall nanotubes (SWNTs), and ribbons based on a controlled under etch that yields very thin (100-200 nanometers) and flexible units allowing transfer and dispersion to other substrates.
  • Microstereolithography: 3D microfabrication by projection microstereolithography (PμSL) is a versatile, low cost process that can be used to rapidly create highly complex micro 3-D polymer structures and devices which can be used by themselves, used as molds, electroplated or with resin additives produce ceramic items.

In addition to the above processes, the following two new processes for producing large arrays of semiconductor nanowires or nanotubes are being incorporated in the Center with the Transfer Printing technology to create new micro/nano components and devices.